Invention Grant
- Patent Title: Silicon carbide semiconductor device having a step film formed between a plating film and a first electrode
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Application No.: US16050401Application Date: 2018-07-31
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Publication No.: US11245013B2Publication Date: 2022-02-08
- Inventor: Yuichi Hashizume , Keishirou Kumada , Yasuyuki Hoshi
- Applicant: FUJI ELECTRIC CO., LTD.
- Applicant Address: JP Kawasaki
- Assignee: FUJI ELECTRIC CO., LTD.
- Current Assignee: FUJI ELECTRIC CO., LTD.
- Current Assignee Address: JP Kawasaki
- Priority: JPJP2017-170679 20170905
- Main IPC: H01L29/16
- IPC: H01L29/16 ; H01L29/66 ; H01L29/10 ; H01L29/06 ; H01L29/78 ; H01L29/417 ; H01L21/02 ; H01L23/532 ; H01L23/00 ; H01L29/423 ; H01L29/739

Abstract:
A silicon carbide semiconductor device includes a first semiconductor layer of a first conductivity type provided on a front surface of a semiconductor substrate of the first conductivity type; a second semiconductor layer of a second conductivity type; a first semiconductor region of the first conductivity type; and a gate electrode having a striped-shape and provided on a gate insulating film. The silicon carbide semiconductor device further includes a first electrode provided on a surface of the second semiconductor layer and the first semiconductor region; a step film provided on the first electrode; a plating film provided on the first electrode and the step film; and a solder on the plating film. The step film is provided on the first electrode on which the solder and the plating film are provided, the step film being provided so as to be embedded in grooves formed on the first electrode.
Public/Granted literature
- US20190074359A1 SILICON CARBIDE SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING A SILICON CARBIDE SEMICONDUCTOR DEVICE Public/Granted day:2019-03-07
Information query
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