Invention Grant
- Patent Title: Artificial synapse with hafnium oxide-based ferroelectric layer in CMOS back-end
-
Application No.: US16502783Application Date: 2019-07-03
-
Publication No.: US11244999B2Publication Date: 2022-02-08
- Inventor: Martin M. Frank , Takashi Ando , Xiao Sun , Jin Ping Han , Vijay Narayanan
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Michael J. Chang, LLC
- Agent Randall Bluestone
- Main IPC: H01L49/02
- IPC: H01L49/02 ; H01L27/11507 ; H01L21/3213 ; H01L21/02 ; H01L21/283 ; H01B3/10

Abstract:
Artificial synaptic devices with an HfO2-based ferroelectric layer that can be implemented in the CMOS back-end are provided. In one aspect, an artificial synapse element is provided. The artificial synapse element includes: a bottom electrode; a ferroelectric layer disposed on the bottom electrode, wherein the ferroelectric layer includes an HfO2-based material that crystallizes in a ferroelectric phase at a temperature of less than or equal to about 400° C.; and a top electrode disposed on the bottom electrode. An artificial synaptic device including the present artificial synapse element and methods for formation thereof are also provided.
Public/Granted literature
- US20190326387A1 Artificial Synapse with Hafnium Oxide-Based Ferroelectric Layer in CMOS Back-End Public/Granted day:2019-10-24
Information query
IPC分类: