Invention Grant
- Patent Title: Stacked type semiconductor device including through electrode
-
Application No.: US16942290Application Date: 2020-07-29
-
Publication No.: US11244928B2Publication Date: 2022-02-08
- Inventor: Nam Jae Lee
- Applicant: SK hynix Inc.
- Applicant Address: KR Icheon-si
- Assignee: SK hynix Inc.
- Current Assignee: SK hynix Inc.
- Current Assignee Address: KR Icheon-si
- Agency: William Park & Associates Ltd.
- Priority: KR10-2020-0030963 20200312
- Main IPC: H01L25/065
- IPC: H01L25/065 ; H01L23/48 ; H01L25/00 ; H01L21/768

Abstract:
There are provided a stacked type semiconductor device and a manufacturing method of the stacked type semiconductor device. The stacked type semiconductor device includes: semiconductor chips stacked to overlap with each other; through electrodes respectively penetrating the semiconductor chips, the through electrodes being bonded to each other; and empty gaps respectively buried in the through electrodes.
Public/Granted literature
- US20210288028A1 STACKED TYPE SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE STACKED TYPE SEMICONDUCTOR DEVICE Public/Granted day:2021-09-16
Information query
IPC分类: