Invention Grant
- Patent Title: Semiconductor device, method for fabricating the semiconductor device, and memory device and system including the semiconductor device
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Application No.: US16703022Application Date: 2019-12-04
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Publication No.: US11244902B2Publication Date: 2022-02-08
- Inventor: Nam-Kuk Kim , Nam-Jae Lee
- Applicant: SK hynix Inc.
- Applicant Address: KR Icheon-si
- Assignee: SK hynix Inc.
- Current Assignee: SK hynix Inc.
- Current Assignee Address: KR Icheon-si
- Agency: William Park & Associates Ltd.
- Priority: KR10-2019-0052203 20190503
- Main IPC: H01L27/11578
- IPC: H01L27/11578 ; H01L23/535 ; G11C16/04 ; H01L27/11573 ; H01L27/11582

Abstract:
A semiconductor device according to an embodiment of the present disclosure may include: a stack structure including a plurality of first conductive patterns and a plurality of dielectric layers, which are alternately stacked, the stack structure having a stepped structure such that any one of the first conductive patterns further protrudes than the first conductive pattern positioned immediately above it; a plurality of second conductive patterns which are respectively formed over protrusions of the first conductive patterns; a plurality of contact plugs which overlap the plurality of second conductive patterns, respectively, and pass through the overlapping second conductive patterns and the stack structure; and a sealing layer pattern which is interposed between the first conductive patterns and the contact plugs and separates the first conductive patterns from the contact plugs.
Public/Granted literature
Information query
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