Invention Grant
- Patent Title: Packaged semiconductor die with micro-cavity
-
Application No.: US16816010Application Date: 2020-03-11
-
Publication No.: US11244876B2Publication Date: 2022-02-08
- Inventor: Matthias Klein , Andreas Zakrzewski , Richard Gruenwald
- Applicant: Microchip Technology Inc.
- Applicant Address: US AZ Chandler
- Assignee: Microchip Technology Inc.
- Current Assignee: Microchip Technology Inc.
- Current Assignee Address: US AZ Chandler
- Agency: Glass and Associates
- Agent Kenneth Glass
- Main IPC: H01L23/16
- IPC: H01L23/16 ; H01L23/31 ; H01L23/00 ; H01L21/56

Abstract:
A packaged electronic die having a micro-cavity and a method for forming a packaged electronic die. The packaged electronic die includes a photoresist frame secured to the electronic die and extending completely around the device. The photoresist frame is further secured to a first major surface of a substrate so as to form an enclosure around the device. Encapsulant material extends over the electronic die and around the sides of the electronic die. The encapsulant material is in contact with the first major surface of the substrate around the entire periphery of the electronic die so as to form a seal around the electronic die.
Public/Granted literature
Information query
IPC分类: