Invention Grant
- Patent Title: FinFET complementary metal-oxide-semiconductor (CMOS) devices
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Application No.: US16849279Application Date: 2020-04-15
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Publication No.: US11244872B2Publication Date: 2022-02-08
- Inventor: Tenko Yamashita , Chen Zhang , Teresa Jacqueline Wu
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Robert Sullivan
- Main IPC: H01L21/8238
- IPC: H01L21/8238 ; H01L21/28 ; H01L29/66 ; H01L29/06 ; H01L29/49 ; H01L29/78 ; H01L27/092

Abstract:
A method of fabricating a complementary metal-oxide-semiconductor device is provided. The method includes forming a work function material layer segment on a gate dielectric layer over a first vertical fin and a bottom spacer layer on an n-type bottom source/drain adjoining the first vertical fin on a first region of a substrate, wherein the gate dielectric layer is also over a second vertical fin, bottom spacer layer on a p-type bottom source/drain adjoining the second vertical fin on a second region. The method further includes heat treating the work function material layer segment to produce a modified work function material layer segment on the first vertical fin with a shifted work function value, forming a second work function material layer on the modified work function material layer segment and the gate dielectric layer on the second vertical fin, and growing a top source/drain on each of the vertical fins.
Public/Granted literature
- US20210327769A1 FINFET COMPLEMENTARY METAL-OXIDE-SEMICONDUCTOR (CMOS) DEVICES Public/Granted day:2021-10-21
Information query
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