Invention Grant
- Patent Title: Architecture of three-dimensional memory device and methods regarding the same
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Application No.: US16402357Application Date: 2019-05-03
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Publication No.: US11244855B2Publication Date: 2022-02-08
- Inventor: Lorenzo Fratin , Enrico Varesi , Paolo Fantini
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Holland & Hart LLP
- Main IPC: H01L21/768
- IPC: H01L21/768 ; H01L21/02 ; H01L23/00 ; G11C5/06 ; G11C8/08 ; G11C5/02

Abstract:
Architectures of 3D memory arrays, systems, and methods regarding the same are described. An array may include a substrate arranged with conductive contacts in a geometric pattern and openings through alternative layers of conductive and insulative material that may decrease the spacing between the openings while maintaining a dielectric thickness to sustain the voltage to be applied to the array. After etching material, a sacrificial layer may be deposited in a trench that forms a serpentine shape. Portions of the sacrificial layer may be removed to form openings, into which cell material is deposited. An insulative material may be formed in contact with the sacrificial layer. The conductive pillars extend substantially perpendicular to the planes of the conductive material and the substrate, and couple to conductive contacts. A chalcogenide material may be formed in the recesses partially around the conductive pillars.
Public/Granted literature
- US20200350203A1 ARCHITECTURE OF THREE-DIMENSIONAL MEMORY DEVICE AND METHODS REGARDING THE SAME Public/Granted day:2020-11-05
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