Invention Grant
- Patent Title: High flow velocity, gas-purged, side storage pod apparatus, assemblies, and methods
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Application No.: US16657685Application Date: 2019-10-18
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Publication No.: US11244844B2Publication Date: 2022-02-08
- Inventor: Paul B. Reuter , Murali Narasimhan , Amulya L. Athayde , Patrick Pannese , Dean C. Hruzek , Nir Merry
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Lowenstein Sandler LLP
- Main IPC: H01L21/673
- IPC: H01L21/673 ; H01L21/677 ; H01L21/67
Abstract:
In some embodiments, a side storage pod apparatus of an equipment front end module (EFEM) includes a side storage enclosure having a surface configured to couple to a side wall of a body of the equipment front end module, and an opening configured to receive substrates from the equipment front end module. The EFEM further includes a side storage chamber within the side storage enclosure having a plurality of support members configured to support substrates thereon. The EFEM further includes a plenum chamber provided proximate the side storage chamber, the plenum chamber being a separate chamber from the side storage chamber and an exhaust port coupled to the plenum chamber.
Information query
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