Invention Grant
- Patent Title: Die ejectors and die supplying apparatuses including ihe same
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Application No.: US16366152Application Date: 2019-03-27
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Publication No.: US11244840B2Publication Date: 2022-02-08
- Inventor: Bub-ryong Lee , Jung-lae Jung , Sung-hyeon Park
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2018-0118495 20181004
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/683

Abstract:
A die ejector includes a supporter configured to support a film on which a die is attached in a vertical direction, an elevation device in a hole of the supporter and configured to move the film with the die attached thereon in the vertical direction and in relation to the supporter, a driver configured to move the elevation device in the vertical direction, an air conduit guide in an enclosure region at least partially defined by an inner surface of the elevation device and having an inner surface defining an air flow conduit, a pressure adjuster device configured to induce air flow through the air flow conduit based on inducing a pressure gradient between the air flow conduit and the pressure adjuster device, and a flow guide in the air flow conduit and configured to control a flow of air through at least a portion of the air flow conduit.
Information query
IPC分类: