Invention Grant
- Patent Title: Test apparatuses including probe card for testing semiconductor devices and operation methods thereof
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Application No.: US16587557Application Date: 2019-09-30
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Publication No.: US11243232B2Publication Date: 2022-02-08
- Inventor: Gyuyeol Kim , Yukyum Kim
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2019-0066927 20190605
- Main IPC: G01R31/317
- IPC: G01R31/317 ; G01R31/319 ; G01R1/073
Abstract:
A probe apparatus includes a tester including a voltage supply, and a probe card including a first probe and a first sensing pin. The first probe is electrically connected to both an output port of the voltage supply and an electrode pad of a first semiconductor device. The first sensing pin is electrically connected to both a controller and a sensing pad of the first semiconductor device.
Information query
