Invention Grant
- Patent Title: Optical difference detector and inspection device
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Application No.: US16981524Application Date: 2019-03-19
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Publication No.: US11243113B2Publication Date: 2022-02-08
- Inventor: Toshiki Yamada
- Applicant: HAMAMATSU PHOTONICS K.K.
- Applicant Address: JP Hamamatsu
- Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee Address: JP Hamamatsu
- Agency: Faegre Drinker Biddle & Reath LLP
- Priority: JPJP2018-102476 20180529
- International Application: PCT/JP2019/011522 WO 20190319
- International Announcement: WO2019/230147 WO 20191205
- Main IPC: G01J1/16
- IPC: G01J1/16 ; H01L31/107

Abstract:
An optical difference detector includes a first APD and a second APD, a first voltage application unit that applies a first bias voltage to the first APD and a second voltage application unit that applies a second bias voltage to the second APD, a differential amplifier that is connected in parallel to the first APD and the second APD and amplifies a difference between a first signal current output from the first APD and a second signal current output from the second APD, and a feedback control unit that controls the second bias voltage so that a low frequency component of a first monitoring current in the first APD and a low frequency component of a second monitoring current in the second APD are equal.
Public/Granted literature
- US20210010856A1 OPTICAL DIFFERENCE DETECTOR AND INSPECTION DEVICE Public/Granted day:2021-01-14
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