Invention Grant
- Patent Title: Metal-oxide-metal capacitor from subtractive back-end-of-line scheme
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Application No.: US16866316Application Date: 2020-05-04
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Publication No.: US11239307B2Publication Date: 2022-02-01
- Inventor: John Jianhong Zhu , Ye Lu , Junjing Bao
- Applicant: QUALCOMM Incorporated
- Applicant Address: US CA San Diego
- Assignee: QUALCOMM Incorporated
- Current Assignee: QUALCOMM Incorporated
- Current Assignee Address: US CA San Diego
- Agency: Patterson & Sheridan, L.L.P.
- Main IPC: H01L23/522
- IPC: H01L23/522 ; H01L49/02 ; H01L21/768

Abstract:
Certain aspects of the present disclosure generally relate to a metal-oxide-metal (MOM) capacitor formed from a subtractive back-end-of-line (BEOL) scheme. One example method of fabricating a semiconductor device generally includes forming an active layer and forming a capacitive element above the active layer with a back-end-of-line subtractive process for conductive materials.
Public/Granted literature
- US20210343830A1 METAL-OXIDE-METAL CAPACITOR FROM SUBTRACTIVE BACK-END-OF-LINE SCHEME Public/Granted day:2021-11-04
Information query
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