Invention Grant
- Patent Title: Isolation walls for vertically stacked transistor structures
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Application No.: US16017971Application Date: 2018-06-25
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Publication No.: US11239232B2Publication Date: 2022-02-01
- Inventor: Aaron Lilak , Patrick Morrow , Gilbert Dewey , Willy Rachmady , Rishabh Mehandru
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt, P.C.
- Main IPC: H01L21/82
- IPC: H01L21/82 ; H01L27/02 ; H01L29/78 ; H01L27/06 ; H01L29/06 ; H01L23/522 ; H01L21/8234 ; H01L21/822

Abstract:
Embodiments herein describe techniques for an integrated circuit (IC). The IC may include a lower device layer that includes a first transistor structure, an upper device layer above the lower device layer including a second transistor structure, and an isolation wall that extends between the upper device layer and the lower device layer. The isolation wall may be in contact with an edge of a first gate structure of the first transistor structure and an edge of a second gate structure of the second transistor structure, and may have a first width to the edge of the first gate structure at the lower device layer, and a second width to the edge of the second gate structure at the upper device layer. The first width may be different from the second width. Other embodiments may be described and/or claimed.
Public/Granted literature
- US20190393214A1 ISOLATION WALLS FOR VERTICALLY STACKED TRANSISTOR STRUCTURES Public/Granted day:2019-12-26
Information query
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