Invention Grant
- Patent Title: Optical scanning device
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Application No.: US16702734Application Date: 2019-12-04
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Publication No.: US11237384B2Publication Date: 2022-02-01
- Inventor: Yuki Maruyama
- Applicant: Yuki Maruyama
- Applicant Address: JP Tokyo
- Assignee: Yuki Maruyama
- Current Assignee: Yuki Maruyama
- Current Assignee Address: JP Tokyo
- Agency: IPUSA, PLLC
- Priority: JPJP2018-240016 20181221
- Main IPC: G02B26/08
- IPC: G02B26/08 ; G02B26/10

Abstract:
An optical scanning device includes a mirror that includes a mirror reflection surface, and torsion bars that support the corresponding sides of the mirror and cause the mirror to rotate. The torsion bars are formed of a silicon active layer whose surface is exposed.
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