Invention Grant
- Patent Title: Resistance measurement device, film manufacturing apparatus, and manufacturing method of electrically conductive film
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Application No.: US17041106Application Date: 2018-12-17
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Publication No.: US11237196B2Publication Date: 2022-02-01
- Inventor: Daiki Morimitsu
- Applicant: NITTO DENKO CORPORATION
- Applicant Address: JP Ibaraki
- Assignee: NITTO DENKO CORPORATION
- Current Assignee: NITTO DENKO CORPORATION
- Current Assignee Address: JP Ibaraki
- Agency: Westerman, Hattori, Daniels & Adrian, LLP
- Priority: JPJP2018-059786 20180327
- International Application: PCT/JP2018/046377 WO 20181217
- International Announcement: WO2019/187395 WO 20191003
- Main IPC: G01R27/02
- IPC: G01R27/02 ; C23C14/34 ; C23C14/54 ; G01N27/90

Abstract:
A resistance measurement device for measuring sheet resistance of an electrically conductive film that is long in one direction includes a probe unit disposed to face the electrically conductive film; a scanning unit that allows the probe unit to scan in a cross direction crossing the one direction over both a conveyance region and a non-conveyance region of the electrically conductive film; and an arithmetic unit that calculates a sheet resistance of the electrically conductive film based on a voltage measured by the probe unit. The arithmetic unit has a memory that memorizes a reference voltage measured in the non-conveyance region, and corrects, based on the reference voltage, an actual voltage measured by allowing the probe unit to scan in the cross direction in the conveyance region.
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