Invention Grant
- Patent Title: Substrate transport apparatus
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Application No.: US17156007Application Date: 2021-01-22
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Publication No.: US11235935B2Publication Date: 2022-02-01
- Inventor: Daniel Babbs , Vincent W. Tsang , Robert C. May
- Applicant: Brooks Automation, Inc.
- Applicant Address: US MA Chelmsford
- Assignee: Brooks Automation, Inc.
- Current Assignee: Brooks Automation, Inc.
- Current Assignee Address: US MA Chelmsford
- Agency: Perman & Green, LLP
- Agent Colin C. Durham
- Main IPC: H01L21/687
- IPC: H01L21/687 ; B65G47/90 ; H01L21/67

Abstract:
A substrate transport apparatus comprising a frame, a drive section connected to the frame, and an articulated arm having at least one articulated arm link operably connected to the drive section so that the articulated arm rotates about a pivot axis relative to the frame and extends and retracts relative to the pivot axis. The articulated arm has an end effector pivotally mounted to at least one articulated arm link forming a joint between the end effector and the articulated arm link, with an arm joint pivot axis disposed so that the end effector rotates relative to at least one articulated arm link about the arm joint pivot axis. The articulated arm has a drive band transmission with drive and driven pulleys where the driven pulley is connected to the articulated wrist.
Public/Granted literature
- US20210229934A1 SUBSTRATE TRANSPORT APPARATUS Public/Granted day:2021-07-29
Information query
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