Invention Grant
- Patent Title: Piezoelectric element, liquid ejection head, and printer
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Application No.: US17081282Application Date: 2020-10-27
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Publication No.: US11223007B2Publication Date: 2022-01-11
- Inventor: Kazuya Kitada , Katsutomo Tsukahara
- Applicant: Seiko Epson Corporation
- Applicant Address: JP Tokyo
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Tokyo
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JPJP2019-195074 20191028
- Main IPC: H01L41/18
- IPC: H01L41/18 ; H01L41/187 ; B41J2/14 ; H01L41/047 ; H01L41/09

Abstract:
A piezoelectric element includes a first electrode provided at a base body, a piezoelectric layer provided at the first electrode and containing a composite oxide that contains potassium, sodium, and niobium and that has a perovskite structure, and a second electrode provided at the piezoelectric layer, wherein the first electrode is a platinum layer, the first electrode is preferentially oriented to (111), and the first electrode has an average crystal grain diameter of 200 nm or more.
Public/Granted literature
- US20210126186A1 Piezoelectric Element, Liquid Ejection Head, And Printer Public/Granted day:2021-04-29
Information query
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