Invention Grant
- Patent Title: Intermetallic compound
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Application No.: US16907986Application Date: 2020-06-22
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Publication No.: US11222957B2Publication Date: 2022-01-11
- Inventor: Magali Gregoire
- Applicant: STMicroelectronics (Crolles 2) SAS
- Applicant Address: FR Crolles
- Assignee: STMicroelectronics (Crolles 2) SAS
- Current Assignee: STMicroelectronics (Crolles 2) SAS
- Current Assignee Address: FR Crolles
- Agency: Crowe & Dunlevy
- Priority: FR1907194 20190628
- Main IPC: H01L29/45
- IPC: H01L29/45 ; H01L21/321 ; H01L21/285 ; H01L21/3213 ; H01L29/06 ; H01L29/08 ; H01L29/161

Abstract:
A NiPt layer with a Pt atom concentration equal to 15% plus or minus 1% is deposited on a semiconductor region (which may, for example, be a source/drain region of a MOS transistor). An anneal is then performed at a temperature of 260° C. plus or minus 20° C., for a duration in the range from 20 to 60 seconds, in order to produce, from the Nickle-Platinum (NiPt) layer and the semiconductor material of said semiconductor region, an intermetallic layer. Advantageously, the intermetallic layer possesses a structure of heteroepitaxy with the semiconductor material, and includes free Pt atoms.
Information query
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