Invention Grant
- Patent Title: Three-dimensional memory device containing inter-select-gate electrodes and methods of making the same
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Application No.: US16828129Application Date: 2020-03-24
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Publication No.: US11222954B2Publication Date: 2022-01-11
- Inventor: Zhixin Cui , Hardwell Chibvongodze , Masatoshi Nishikawa
- Applicant: SANDISK TECHNOLOGIES LLC
- Applicant Address: US TX Addison
- Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee Address: US TX Addison
- Agency: The Marbury Law Group PLLC
- Main IPC: G11C11/34
- IPC: G11C11/34 ; H01L29/423 ; H01L27/11582 ; H01L29/417 ; H01L21/28 ; G11C16/10 ; G11C16/14 ; G11C16/26 ; G11C16/04 ; H01L27/11565

Abstract:
A three-dimensional memory device includes an alternating stack of word-line-isolation insulating layers and word-line-level electrically conductive layers located over a substrate, a plurality of drain-select-level electrodes that are laterally spaced apart from each other overlying the alternating stack, memory stack structures containing a respective vertical semiconductor channel laterally surrounded by a respective memory film and vertically extending through the alternating stack and the plurality of drain-select-level electrodes, inter-select-gate electrodes located between a respective neighboring pair of the drain-select-level electrodes, and inter-select-gate dielectrics located between each of the inter-select-gate electrodes and a neighboring one of the drain-select-level electrodes. The inter-select-gate electrodes are not electrically connected to the drain-select-level electrodes.
Public/Granted literature
- US20210305384A1 THREE-DIMENSIONAL MEMORY DEVICE CONTAINING INTER-SELECT-GATE ELECTRODES AND METHODS OF MAKING THE SAME Public/Granted day:2021-09-30
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