Invention Grant
- Patent Title: Method for transferring a layer by using a detachable structure
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Application No.: US16769976Application Date: 2018-11-21
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Publication No.: US11222824B2Publication Date: 2022-01-11
- Inventor: Michel Bruel
- Applicant: Soitec
- Applicant Address: FR Bernin
- Assignee: Soitec
- Current Assignee: Soitec
- Current Assignee Address: FR Bernin
- Agency: TraskBritt
- Priority: FR1761759 20171207
- International Application: PCT/FR2018/052939 WO 20181121
- International Announcement: WO2019/110886 WO 20190613
- Main IPC: H01L21/78
- IPC: H01L21/78 ; H01L21/304

Abstract:
A method for transferring a superficial layer from a detachable structure comprises the following steps: a) supplying the detachable structure comprising: •a support substrate, •a detachable layer arranged on the support substrate along a main plane and comprising a plurality of walls that are separated from one another, each wall having at least one side that is perpendicular to the main plane; •a superficial layer arranged on the detachable layer along the main plane; b) applying a mechanical force configured to cause said walls to bend, along a direction that is secant to said side, until causing the mechanical rupture of the walls, in order to detach the superficial layer from the support substrate.
Information query
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