• Patent Title: Method for transferring a layer by using a detachable structure
  • Application No.: US16769976
    Application Date: 2018-11-21
  • Publication No.: US11222824B2
    Publication Date: 2022-01-11
  • Inventor: Michel Bruel
  • Applicant: Soitec
  • Applicant Address: FR Bernin
  • Assignee: Soitec
  • Current Assignee: Soitec
  • Current Assignee Address: FR Bernin
  • Agency: TraskBritt
  • Priority: FR1761759 20171207
  • International Application: PCT/FR2018/052939 WO 20181121
  • International Announcement: WO2019/110886 WO 20190613
  • Main IPC: H01L21/78
  • IPC: H01L21/78 H01L21/304
Method for transferring a layer by using a detachable structure
Abstract:
A method for transferring a superficial layer from a detachable structure comprises the following steps: a) supplying the detachable structure comprising: •a support substrate, •a detachable layer arranged on the support substrate along a main plane and comprising a plurality of walls that are separated from one another, each wall having at least one side that is perpendicular to the main plane; •a superficial layer arranged on the detachable layer along the main plane; b) applying a mechanical force configured to cause said walls to bend, along a direction that is secant to said side, until causing the mechanical rupture of the walls, in order to detach the superficial layer from the support substrate.
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