Invention Grant
- Patent Title: Integrated circuit (IC) structure for high performance and functional density
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Application No.: US16600845Application Date: 2019-10-14
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Publication No.: US11222814B2Publication Date: 2022-01-11
- Inventor: Min-Feng Kao , Dun-Nian Yaung , Hsing-Chih Lin , Jen-Cheng Liu , Kuan-Chieh Huang
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L21/768
- IPC: H01L21/768 ; H01L27/088 ; H01L21/762 ; H01L23/522 ; H01L23/48 ; H01L27/06 ; H01L21/822 ; H01L23/525 ; H01L25/00

Abstract:
An integrated circuit (IC) provides high performance and high functional density. A first back-end-of-line (BEOL) interconnect structure and a second BEOL interconnect structure are respectively under and over a semiconductor substrate. A first electronic device and a second electronic device are between the semiconductor substrate and respectively a bottom of the first BEOL interconnect structure and a top of the second BEOL interconnect structure. A through substrate via (TSV) extends through the semiconductor substrate, from the first BEOL interconnect structure to the second BEOL interconnect structure. A method for manufacturing the IC is also provided.
Public/Granted literature
- US20200066584A1 INTEGRATED CIRCUIT (IC) STRUCTURE FOR HIGH PERFORMANCE AND FUNCTIONAL DENSITY Public/Granted day:2020-02-27
Information query
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