Invention Grant
- Patent Title: Metal plate, method of manufacturing metal plate, and method of manufacturing mask by using metal plate
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Application No.: US16790031Application Date: 2020-02-13
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Publication No.: US11217750B2Publication Date: 2022-01-04
- Inventor: Chikao Ikenaga
- Applicant: Dai Nippon Printing Co., Ltd.
- Applicant Address: JP Tokyo
- Assignee: Dai Nippon Printing Co., Ltd.
- Current Assignee: Dai Nippon Printing Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Burr & Brown, PLLC
- Priority: JP2014-099811 20140513
- Main IPC: B21B1/40
- IPC: B21B1/40 ; B21B3/02 ; H05B33/10 ; B21B15/00 ; H01L51/00 ; C23F1/02 ; H01L51/50 ; C23C14/04

Abstract:
A method of inspecting an elongated metal plate is provided, including measuring longitudinal direction metal plate thicknesses, measuring width direction metal plate thicknesses, and selecting the metal plate that satisfies condition (1), (B/A)×100 (%) is 5% or less, A being an average value of the longitudinal direction metal plate thicknesses, and B being obtained by multiplying a standard deviation of the longitudinal direction metal plate thicknesses by 3, and that satisfies condition (2), (C/X)×100 (%) is 3% or less, C being a value obtained by multiplying a standard deviation of the width direction metal plate thicknesses by 3, and X being a central portion width direction metal plate thickness obtained when the width direction metal plate thicknesses are measured to calculate the standard deviation of the metal plate thicknesses in the width direction.
Public/Granted literature
- US20200185607A1 METAL PLATE, METHOD OF MANUFACTURING METAL PLATE, AND METHOD OF MANUFACTURING MASK BY USING METAL PLATE Public/Granted day:2020-06-11
Information query
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