Invention Grant
- Patent Title: Method of manufacturing a thin film transistor
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Application No.: US16770827Application Date: 2020-06-05
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Publication No.: US11217698B2Publication Date: 2022-01-04
- Inventor: Chuanbao Luo
- Applicant: SHENZHEN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO., LTD.
- Applicant Address: CN Guangdong
- Assignee: SHENZHEN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO., LTD.
- Current Assignee: SHENZHEN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO., LTD.
- Current Assignee Address: CN Guangdong
- Agency: The Roy Gross Law Firm, LLC
- Agent Roy Gross
- Priority: CN202010454684.8 20200526
- International Application: PCT/CN2020/094656 WO 20200605
- Main IPC: H01L27/00
- IPC: H01L27/00 ; H01L29/00 ; H01L29/786 ; H01L27/32 ; G02F1/1368 ; G02F1/1362 ; H01L27/12

Abstract:
A thin film transistor is provided. The thin film transistor includes an active layer, and the active layer includes a plurality of stacked structures, and each of the stacked structures includes: a N-layer indium oxidation layer; a gallium oxidation layer, the gallium oxidation layer is provided on the indium oxidation layer of the N-layer indium oxidation layer; and a zinc oxidation layer is provided on the gallium oxidation layer. These stacked structures improve the performance of the thin film transistor. A preparation method of the thin film transistor and a display panel containing the thin film transistor is also provided.
Public/Granted literature
- US20210376160A1 THIN FILM TRANSISTOR, MANUFACTURING METHOD THEREOF, AND DISPLAY PANEL Public/Granted day:2021-12-02
Information query
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