Invention Grant
- Patent Title: Semiconductor device structure and manufacturing method
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Application No.: US16219453Application Date: 2018-12-13
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Publication No.: US11217548B2Publication Date: 2022-01-04
- Inventor: Li-Guo Lee , Yung-Sheng Liu , Yi-Chen Liu , Yi-Jen Lai , Chun-Jen Chen , Hsi-Kuei Cheng
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Haynes and Boone, LLP
- Main IPC: H01L23/00
- IPC: H01L23/00

Abstract:
A semiconductor device structure and a manufacturing method are provided. The semiconductor device structure includes a semiconductor substrate and a dielectric layer over the semiconductor substrate. The semiconductor device structure also includes a conductive trace over the dielectric layer. The semiconductor device structure further includes a conductive feature over the conductive trace, and a width of the conductive feature is substantially equal to or larger than a maximum width of the conductive trace. In addition, the semiconductor device structure includes a conductive bump over the conductive feature.
Public/Granted literature
- US20190131264A1 Semiconductor Device Structure and Manufacturing Method Public/Granted day:2019-05-02
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