Invention Grant
- Patent Title: Three-dimensional module with integrated passive components
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Application No.: US16926606Application Date: 2020-07-10
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Publication No.: US11217542B2Publication Date: 2022-01-04
- Inventor: Guobiao Zhang , Hongyu Yu , Yuejin Guo , Shengming Zhou , Guoxing Zhang , Guangzhao Liu , Mingtao Hu , Wang Zhang
- Applicant: Southern University of Science and Technology
- Applicant Address: CN Shenzhen
- Assignee: Southern University of Science and Technology
- Current Assignee: Southern University of Science and Technology
- Current Assignee Address: CN Shenzhen
- Agency: United States Research and Patent Firm
- Agent George G. Wang
- Priority: CN201910619802.3 20190710
- Main IPC: H01L23/64
- IPC: H01L23/64 ; H01L21/48 ; H01L21/683 ; H01L23/538 ; H01L49/02

Abstract:
A three-dimensional (3-D) module with integrated passive components includes a plurality of vertically stacked sub-modules. Each sub-module comprises a device level comprising a high-k dielectric (e.g. ceramic) material and an interconnect level comprising a low-k dielectric (e.g. organic) material. The passive components in the device level are fired integrally, whereas the device level and the interconnect level are fired independently.
Public/Granted literature
- US20210013162A1 Three-Dimensional Module with Integrated Passive Components Public/Granted day:2021-01-14
Information query
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