A vacuum transfer apparatus includes a vacuum chamber, a transfer robot, and a bellows. The vacuum chamber has a through-hole communicating with an outside. The transfer robot includes an arm unit disposed in the vacuum chamber to support a substrate, a support unit configured to support the arm unit while passing through the through-hole with a gap between the support unit and the through-hole, and a base unit disposed at the outside of the vacuum chamber to support the support unit. The bellows surrounds a periphery of the support unit and is sealed and attached to the arm unit and an inner wall of the vacuum chamber around the through-hole.