Invention Grant
- Patent Title: Probe for testing an electrical property of a test sample
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Application No.: US16487735Application Date: 2018-03-02
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Publication No.: US11215638B2Publication Date: 2022-01-04
- Inventor: Lior Shiv
- Applicant: CAPRES A/S
- Applicant Address: DK Kgs. Lyngby
- Assignee: CAPRES A/S
- Current Assignee: CAPRES A/S
- Current Assignee Address: DK Kgs. Lyngby
- Agency: Hodgson Russ LLP
- Priority: EP17159606 20170307
- International Application: PCT/EP2018/055159 WO 20180302
- International Announcement: WO2018/162343 WO 20180913
- Main IPC: G01R1/067
- IPC: G01R1/067 ; G01R1/073 ; G01R31/28

Abstract:
A probe for direct nano- and micro-scale electrical characterization of materials and semi conductor wafers. The probe (10) comprises a probe body (12), a first cantilever (20a) extending from the probe body. The first cantilever defining a first loop with respect to said probe body. The probe further comprises a first contact probe being supported by said first cantilever, and a second contact probe being electrically insulated from the first contact probe. The second contact probe being supported by the first cantilever or by a second cantilever (20b) extending from the probe body.
Public/Granted literature
- US20200241043A1 A PROBE FOR TESTING AN ELECTRICAL PROPERTY OF A TEST SAMPLE Public/Granted day:2020-07-30
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