• Patent Title: Probe for testing an electrical property of a test sample
  • Application No.: US16487735
    Application Date: 2018-03-02
  • Publication No.: US11215638B2
    Publication Date: 2022-01-04
  • Inventor: Lior Shiv
  • Applicant: CAPRES A/S
  • Applicant Address: DK Kgs. Lyngby
  • Assignee: CAPRES A/S
  • Current Assignee: CAPRES A/S
  • Current Assignee Address: DK Kgs. Lyngby
  • Agency: Hodgson Russ LLP
  • Priority: EP17159606 20170307
  • International Application: PCT/EP2018/055159 WO 20180302
  • International Announcement: WO2018/162343 WO 20180913
  • Main IPC: G01R1/067
  • IPC: G01R1/067 G01R1/073 G01R31/28
Probe for testing an electrical property of a test sample
Abstract:
A probe for direct nano- and micro-scale electrical characterization of materials and semi conductor wafers. The probe (10) comprises a probe body (12), a first cantilever (20a) extending from the probe body. The first cantilever defining a first loop with respect to said probe body. The probe further comprises a first contact probe being supported by said first cantilever, and a second contact probe being electrically insulated from the first contact probe. The second contact probe being supported by the first cantilever or by a second cantilever (20b) extending from the probe body.
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