Invention Grant
- Patent Title: Micromechanical inertial sensor
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Application No.: US16748911Application Date: 2020-01-22
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Publication No.: US11215632B2Publication Date: 2022-01-04
- Inventor: Johannes Classen , Lars Tebje
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Norton Rose Fulbright US LLP
- Agent Gerard Messina
- Priority: DE102019200839.9 20190124
- Main IPC: G01P15/18
- IPC: G01P15/18 ; G01P15/125 ; G01P1/00

Abstract:
A micromechanical inertial sensor, having a substrate; and a seismic mass which is connected to the substrate and developed so that it has a detection capability of a low-g acceleration of approximately 1 g in a first Cartesian coordinate direction, and the seismic mass is furthermore developed so that it has a detection capability of a high-g acceleration of at least approximately 100 g in at least one second Cartesian coordinate direction.
Public/Granted literature
- US20200241035A1 MICROMECHANICAL INERTIAL SENSOR Public/Granted day:2020-07-30
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