Vacuum pump control apparatus and vacuum pump, and assembly method of vacuum pump control apparatus
Abstract:
A vacuum pump control apparatus may include a plurality of circuit boards including a first circuit board and a second circuit board which constitute a control circuit that controls a vacuum pump main body; a housing having an internal space in which the plurality of the circuit boards are arranged, in which an upper side of the housing is open; a heat radiating plate having a bottom surface portion to which the first circuit board is mounted so as to enable heat radiation and which is arranged on the housing so as to close the opening of the housing; and a board fixing means which fixes the second circuit board to a board mounting seat portion of the housing so as to enable heat radiation.
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