Invention Grant
- Patent Title: Method of adjusting brightness of illuminator in processing apparatus
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Application No.: US17143373Application Date: 2021-01-07
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Publication No.: US11140335B2Publication Date: 2021-10-05
- Inventor: Takafumi Omori , Satoshi Miyata
- Applicant: DISCO CORPORATION
- Applicant Address: JP Tokyo
- Assignee: DISCO CORPORATION
- Current Assignee: DISCO CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Greer Burns & Crain Ltd.
- Priority: JPJP2020-010716 20200127
- Main IPC: H04N5/235
- IPC: H04N5/235 ; H04N5/232

Abstract:
A method of adjusting the brightness of an illuminator in a processing apparatus includes, by a first processing apparatus, storing a sample image obtained by photographing a workpiece with a brightness specified by a first control value, together with the first control value, copying the sample image, the first control value and a processing condition to a second processing apparatus, by the second processing apparatus, storing a plurality of comparative images obtained by photographing the workpiece with brightnesses specified by a plurality of different control values, identifying a control value at a time of photographing a comparative image having a minimum difference in brightness from the sample image as a second control value, by comparing the sample image with the plurality of comparative images, and setting a difference between the first and second control values as a correction value of the control value of the second processing apparatus.
Public/Granted literature
- US20210235007A1 METHOD OF ADJUSTING BRIGHTNESS OF ILLUMINATOR IN PROCESSING APPARATUS Public/Granted day:2021-07-29
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