Invention Grant
- Patent Title: Storage apparatus for storing cassettes for substrates and processing apparatus equipped therewith
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Application No.: US16637134Application Date: 2018-08-07
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Publication No.: US11139191B2Publication Date: 2021-10-05
- Inventor: Adriaan Garssen , Edwin den Hartog-Besselink
- Applicant: ASM IP Holding B.V.
- Applicant Address: NL Almere
- Assignee: ASM IP Holding B.V.
- Current Assignee: ASM IP Holding B.V.
- Current Assignee Address: NL Almere
- Agency: Snell & Wilmer L.L.P.
- International Application: PCT/IB2018/001003 WO 20180807
- International Announcement: WO2019/030565 WO 20190214
- Main IPC: H01L21/677
- IPC: H01L21/677 ; H01L21/67 ; H01L21/68
Abstract:
A storage apparatus to store cassettes for substrates comprising a moveable base plate constructed and arranged to hold cassettes, an outer wall provided with an opening to receive and remove the cassettes from the base plate, and a moving device constructed and arranged to move the base plate with respect to the opening is disclosed. The storage apparatus is provided with a stationary sensor near the opening for detecting at least one of a presence and a correct orientation of a substrate cassette on the base plate at the opening.
Public/Granted literature
- US20200258766A1 STORAGE APPARATUS FOR STORING CASSETTES FOR SUBSTRATES AND PROCESSING APPARATUS EQUIPPED THEREWITH Public/Granted day:2020-08-13
Information query
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