Invention Grant
- Patent Title: Electronic device including hermetic micro-cavity and methods of preparing the same
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Application No.: US16712679Application Date: 2019-12-12
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Publication No.: US11139164B2Publication Date: 2021-10-05
- Inventor: Thomas A. Hanft , Michael A. Moore , John Bedinger
- Applicant: Raytheon Company
- Applicant Address: US MA Waltham
- Assignee: Raytheon Company
- Current Assignee: Raytheon Company
- Current Assignee Address: US MA Waltham
- Agency: Lewis Roca Rothgerber Christie LLP
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L23/29 ; H01L21/768 ; H01L23/532
Abstract:
An electronic device includes: a water impermeable substrate; at least one electronic circuit on the water impermeable substrate; a dielectric encapsulant on the electronic circuit; a capping layer comprising a polymer on the dielectric encapsulant; and a barrier layer on the capping layer, the water impermeable substrate, the dielectric encapsulant, the capping layer, and the barrier layer forming a hermetically sealed micro-cavity.
Public/Granted literature
- US20210183647A1 ELECTRONIC DEVICE INCLUDING HERMETIC MICRO-CAVITY AND METHODS OF PREPARING THE SAME Public/Granted day:2021-06-17
Information query
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