Invention Grant
- Patent Title: Gallium nitride based ultra-violet sensor with intrinsic amplification and method of operating same
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Application No.: US16535548Application Date: 2019-08-08
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Publication No.: US11081613B2Publication Date: 2021-08-03
- Inventor: Yakov Roizin , Carmel Sahar , Victor Kairys , Ruth Shima-edelstein
- Applicant: Tower Semiconductor Ltd.
- Applicant Address: IL Migdal Haemek
- Assignee: Tower Semiconductor Ltd.
- Current Assignee: Tower Semiconductor Ltd.
- Current Assignee Address: IL Migdal Haemek
- Agency: Bever, Hoffman & Harms, LLP
- Main IPC: H01L31/112
- IPC: H01L31/112 ; G01J1/42 ; H01L31/0304 ; H01L31/024

Abstract:
A UV sensor includes a GaN stack including a low-resistance GaN layer formed over a nucleation layer, and a high-resistance GaN layer formed over the low-resistance GaN layer, wherein a 2DEG conductive channel exists at the upper surface of the high-resistance GaN layer. An AlGaN layer is formed over the upper surface of the high-resistance GaN layer. A source contact and a drain contact extend through the AlGaN layer and contact the upper surface of the high-resistance GaN layer (and are thereby electrically coupled to the 2DEG channel). A drain depletion region extends entirely from the upper surface of the high-resistance GaN layer to the low-resistance GaN layer under the drain contact. An electrical current between the source and drain contacts is a function of UV light received by the GaN stack. An electrode is connected to the low-resistance GaN layer to allow for electrical refresh of the UV sensor.
Public/Granted literature
- US20210043793A1 Gallium Nitride Based Ultra-Violet Sensor With Intrinsic Amplification and Method of Operating Same Public/Granted day:2021-02-11
Information query
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