Invention Grant
- Patent Title: Method of providing partial electrical shielding
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Application No.: US16881954Application Date: 2020-05-22
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Publication No.: US11081541B2Publication Date: 2021-08-03
- Inventor: Veronica Sciriha , Georg Seidemann
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Schwegman Lundberg & Woessner, P.A.
- Main IPC: H01L23/64
- IPC: H01L23/64 ; H01L49/02 ; H01L23/522 ; H01L23/00

Abstract:
A system and method of providing a coil in an electronic communication device in is disclosed. Multiple dielectric layers are deposited and patterned on a semiconductor substrate or insulating mold compound. The dielectric layers provide conductive contact with a contact pad on the underlying structure. Shielding for the coil, including a seed layer covered by an insulating material, is disposed in a via of a lowermost of the dielectric layers. Grounding of the shielding seed layer is through a contact pad on the substrate or a trace between the dielectric layers. A coil is fabricated over the shielding and a solder mask deposited and patterned to cover and insulate the coil. The coil is fabricated in a via of a dielectric layer immediately below the solder mask or above this dielectric layer. Electrical contact is provided by multiple copper and seed layers in the solder mask and dielectric layers.
Public/Granted literature
- US20200286982A1 METHOD OF PROVIDING PARTIAL ELECTRICAL SHIELDING Public/Granted day:2020-09-10
Information query
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