Invention Grant
- Patent Title: CMOS circuit with a group III-nitride transistor and method of providing same
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Application No.: US16637592Application Date: 2017-09-29
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Publication No.: US11081483B2Publication Date: 2021-08-03
- Inventor: Willy Rachmady , Ravi Pillarisetty , Han Wui Then , Marko Radosavljevic , Sansaptak Dasgupta , Van H. Le
- Applicant: INTEL CORPORATION
- Applicant Address: US CA Santa Clara
- Assignee: INTEL CORPORATION
- Current Assignee: INTEL CORPORATION
- Current Assignee Address: US CA Santa Clara
- Agency: Green, Howard & Mughal LLP
- International Application: PCT/US2017/054601 WO 20170929
- International Announcement: WO2019/066966 WO 20190404
- Main IPC: H01L27/092
- IPC: H01L27/092 ; H01L29/06 ; H01L29/20 ; H01L29/205 ; H01L29/778 ; H01L29/786 ; H01L21/8252 ; H01L29/66

Abstract:
Techniques and mechanisms for providing a complementary metal-oxide-semiconductor (CMOS) circuit which includes a group III-nitride (III-N) material. In an embodiment, an n-type transistor of the CMOS circuit comprises structures which are variously disposed on a group III-N semiconductor material. The n-type transistor is coupled to a p-type transistor of the CMOS circuit, wherein a channel region of the p-type transistor comprises a group III-V semiconductor material. The channel region is configured to conduct current along a first direction, where a surface portion of the group III-N semiconductor material extends along a second direction perpendicular to the second direction. In another embodiment, the group III-N semiconductor material includes a gallium-nitride (GaN) compound, and the group III-V semiconductor material includes a nanopillar of an indium antimonide (InSb) compound.
Public/Granted literature
- US20200258884A1 CMOS CIRCUIT WITH A GROUP III-NITRIDE TRANSISTOR AND METHOD OF PROVIDING SAME Public/Granted day:2020-08-13
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