Invention Grant
- Patent Title: Method of producing microelectronic components
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Application No.: US16712158Application Date: 2019-12-12
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Publication No.: US11081399B2Publication Date: 2021-08-03
- Inventor: Nicolas Posseme , Cyrille Le Royer
- Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Applicant Address: FR Paris
- Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee Address: FR Paris
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR1872889 20181213
- Main IPC: H01L21/8238
- IPC: H01L21/8238 ; H01L29/78 ; H01L27/092 ; H01L29/06

Abstract:
A method is provided for producing a microelectronic component on a substrate including in an exposed manner on a first face thereof, an active zone and an electrical isolation zone adjacent thereto, the method including forming a gate on the active zone, forming spacers each configured to cover a surface of a different edge of the gate, and forming source and drain zones by doping portions of the active zone adjacent to the gate, the method successively including forming a first layer of spacer material above the active zone and the electrical isolation zone; an ion implantation to produce doping of the portions through the first layer; removing a modified portion of the first layer disposed overlooking the portions, the modified portion coming from the ion implantation, the removing being configured to preserve at least part of the first layer at a level of edges of the gate.
Public/Granted literature
- US20200211906A1 METHOD OF PRODUCING MICROELECTRONIC COMPONENTS Public/Granted day:2020-07-02
Information query
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