Invention Grant
- Patent Title: Package system for integrated circuits
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Application No.: US16712184Application Date: 2019-12-12
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Publication No.: US11081372B2Publication Date: 2021-08-03
- Inventor: Wei-Cheng Wu , Shang-Yun Hou , Shin-Puu Jeng , Chen-Hua Yu
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee Address: TW Hsinchu
- Agency: Hauptman Ham, LLP
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/56 ; H01L25/065 ; H01L25/00 ; H01L23/498 ; H01L21/48 ; H01L21/768 ; H01L23/00 ; H01L23/31

Abstract:
A package system includes a first interposer including a first substrate having first and second primary surfaces on opposite sides of the first substrate. The package system includes a first interconnect structure over the first surface, the first interconnect structure having a first metallic line pitch LP1. The package system includes a plurality of first through silicon via (TSV) structures in the first substrate. The package system includes a molding compound material partially enveloping the first substrate. The package system includes a plurality of through vias in the molding compound material, wherein each through via of the plurality of through vias is offset from the first substrate. The package system includes a second interconnect structure on a second surface of the first substrate. The second interconnect structure has a second metallic line pitch LP2, and LP2>LP1. The package system includes a first integrated circuit over the first interposer.
Information query
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