Invention Grant
- Patent Title: Piezoelectric vibrator and sensor
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Application No.: US15773157Application Date: 2016-11-04
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Publication No.: US11031539B2Publication Date: 2021-06-08
- Inventor: Akira Yoshikawa , Yuji Ohashi , Yuui Yokota , Kei Kamada , Masatoshi Ito , Kenji Inoue , Hiroyuki Amano
- Applicant: PIEZO STUDIO INC. , TOHOKU UNIVERSITY
- Applicant Address: JP Sendai; JP Sendai
- Assignee: PIEZO STUDIO INC.,TOHOKU UNIVERSITY
- Current Assignee: PIEZO STUDIO INC.,TOHOKU UNIVERSITY
- Current Assignee Address: JP Sendai; JP Sendai
- Agency: Womble Bond Dickinson (US) LLP
- Priority: JPJP2015-217394 20151105
- International Application: PCT/JP2016/082792 WO 20161104
- International Announcement: WO2017/078135 WO 20170511
- Main IPC: H01L41/187
- IPC: H01L41/187 ; H01L41/113 ; H01L41/053 ; H03H3/04 ; H03H9/02 ; H01L41/047 ; H01L41/09
Abstract:
To provide a vibrator made of a piezoelectric crystal having a larger electromechanical coupling coefficient and a more satisfactory frequency-temperature characteristic than those of quartz, a vibrating piece (101) is made of a Ca3Ta(Ga1-xAlx)3Si2O14 single crystal (0
Public/Granted literature
- US20180323366A1 PIEZOELECTRIC VIBRATOR AND SENSOR Public/Granted day:2018-11-08
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