Invention Grant
- Patent Title: Semiconductor device and method of manufacture
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Application No.: US16634628Application Date: 2018-07-27
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Publication No.: US11031507B2Publication Date: 2021-06-08
- Inventor: Johnny Dahl , Vicente Calvo Alonso , Jouko Lang
- Applicant: Comptek Solutions Oy
- Applicant Address: FI Turku
- Assignee: Comptek Solutions Oy
- Current Assignee: Comptek Solutions Oy
- Current Assignee Address: FI Turku
- Agent James C. Lydon
- Priority: GB1712150 20170728
- International Application: PCT/FI2018/050556 WO 20180727
- International Announcement: WO2019/020869 WO 20190131
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L29/786

Abstract:
Disclosed is a semiconductor device and a method of manufacturing the said semiconductor device. The semiconductor device comprises a plurality of layers. The method of fabricating the semiconductor device comprises obtaining a substrate layer, arranging a first corresponding crystalline terminating oxide layer on the substrate layer, arranging at least one semiconductor layer on the first crystalline terminating oxide layer, arranging a second corresponding crystalline terminating oxide layer on the at least one semiconductor layer, and arranging an electrical insulating layer on the second crystalline terminating oxide layer.
Public/Granted literature
- US20210091231A1 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURE Public/Granted day:2021-03-25
Information query
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