Invention Grant
- Patent Title: Package having redistribution layer structure with protective layer and method of fabricating the same
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Application No.: US16114246Application Date: 2018-08-28
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Publication No.: US11031344B2Publication Date: 2021-06-08
- Inventor: Chen-Hua Yu , Kuo-Chung Yee , Chun-Hui Yu
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: JCIPRNET
- Main IPC: H01L23/538
- IPC: H01L23/538 ; H01L23/00 ; H01L25/10 ; H01L21/56 ; H01L21/48 ; H01L25/00 ; H01L23/31

Abstract:
Provided is a package including a die, a redistribution layer (RDL) structure, and a plurality of conductive connectors. The RDL structure includes a dielectric layer, a conductive feature, and a protective layer. The conductive feature is disposed in the dielectric layer and electrically connected to the die. The protective layer is disposed between the dielectric layer and the conductive feature. The protective layer, the dielectric layer, and the conductive feature have different materials. The plurality of conductive connectors are electrically connected to the die through the RDL structure.
Public/Granted literature
- US20200075496A1 PACKAGE AND METHOD OF FABRICATING THE SAME Public/Granted day:2020-03-05
Information query
IPC分类: