Invention Grant
- Patent Title: Ingot puller apparatus that include a doping conduit with a porous partition member for subliming solid dopant
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Application No.: US16220060Application Date: 2018-12-14
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Publication No.: US11028500B2Publication Date: 2021-06-08
- Inventor: Roberto Scala , Stephan Haringer , Franco Battan
- Applicant: GLOBALWAFERS CO., LTD.
- Applicant Address: TW Hsinchu
- Assignee: GLOBALWAFERS CO., LTD.
- Current Assignee: GLOBALWAFERS CO., LTD.
- Current Assignee Address: TW Hsinchu
- Agency: Armstrong Teasdale LLP
- Main IPC: C30B15/14
- IPC: C30B15/14 ; C30B15/20 ; C30B29/06

Abstract:
Ingot puller apparatus for preparing silicon ingots that include a dopant feed system are disclosed. The dopant feed system include a dopant conduit having a porous partition member disposed across the dopant conduit. Solid dopant falls onto the partition member where it sublimes. The sublimed dopant is carried by inert gas through the partition member to contact and dope the silicon melt.
Information query
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