- Patent Title: Semiconductor package with antenna and fabrication method thereof
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Application No.: US16399659Application Date: 2019-04-30
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Publication No.: US11024954B2Publication Date: 2021-06-01
- Inventor: Nai-Wei Liu , Yen-Yao Chi , Tzu-Hung Lin , Wen-Sung Hsu
- Applicant: MediaTek Inc.
- Applicant Address: TW Hsin-Chu
- Assignee: MediaTek Inc.
- Current Assignee: MediaTek Inc.
- Current Assignee Address: TW Hsin-Chu
- Agency: Wolf, Greenfield & Sacks, P.C.
- Main IPC: H01Q1/38
- IPC: H01Q1/38 ; H01Q9/16 ; H01L23/00 ; H01L21/56 ; H01L23/66

Abstract:
A method of forming a semiconductor package structure includes providing a first wafer-level package structure having a die region surrounded by a scribe line region. The first wafer-level package structure includes a first encapsulating layer, a first redistribution layer (RDL) structure formed on the first encapsulating layer, a first antenna element formed in the first RDL structure and corresponding to the die region, and a semiconductor die in the first encapsulating layer and corresponding to the die region. A second wafer-level package structure is bonded onto the first RDL structure using a first adhesive layer. The second wafer-level package structure includes a second encapsulating layer attached to the first adhesive layer, and a second antenna element formed on the second encapsulating layer. The second antenna element and the first antenna element form a pitch antenna after the bonding of the second wafer-level package structure.
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