Invention Grant
- Patent Title: Substrate processing apparatus and method
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Application No.: US16128282Application Date: 2018-09-11
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Publication No.: US11024523B2Publication Date: 2021-06-01
- Inventor: Theodorus Oosterlaken
- Applicant: ASM IP Holding B.V.
- Applicant Address: NL Almere
- Assignee: ASM IP Holding B.V.
- Current Assignee: ASM IP Holding B.V.
- Current Assignee Address: NL Almere
- Agency: Snell & Wilmer L.L.P.
- Main IPC: F27D5/00
- IPC: F27D5/00 ; H01L21/67 ; H01L21/673 ; F27D3/00 ; F27B17/00
Abstract:
A substrate processing apparatus, comprising a substrate support (32) provided with a support surface (34) for supporting a substrate or a substrate carrier (24) thereon and a support heater (50) constructed and arranged to heat the support surface (34). The apparatus comprises a heat shield constructed and arranged to cover and shield the substrate support (32) when no substrate or substrate carrier (24) is on the support surface.
Public/Granted literature
- US20200083068A1 SUBSTRATE PROCESSING APPARATUS AND METHOD Public/Granted day:2020-03-12
Information query
