Invention Grant
- Patent Title: Method for high speed EELS spectrum acquisition
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Application No.: US16635725Application Date: 2018-08-01
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Publication No.: US11024484B2Publication Date: 2021-06-01
- Inventor: Edward Michael James , Ray Dudley Twesten
- Applicant: Gatan, Inc.
- Applicant Address: US CA Pleasanton
- Assignee: Gatan, Inc.
- Current Assignee: Gatan, Inc.
- Current Assignee Address: US CA Pleasanton
- Agency: Snyder, Clark, Lesch & Chung, LLP
- International Application: PCT/US2018/044786 WO 20180801
- International Announcement: WO2019/028129 WO 20190207
- Main IPC: H01J37/26
- IPC: H01J37/26 ; H01J37/22 ; H01J37/24 ; H01J37/05 ; H01J37/244

Abstract:
A system and method are disclosed for acquiring Electron Energy Loss Spectrometry (EELS) spectra in a transmission electron microscope. The inventive system and method maximize spectrum acquisition rate and duty cycle by exposing a first portion of an image sensor to a first spectrum while a previously exposed potion of the sensor is read out of the sensor during some or all of the exposure time.
Public/Granted literature
- US20210090856A1 METHOD FOR HIGH SPEED EELS SPECTRUM ACQUISITION Public/Granted day:2021-03-25
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