Invention Grant
- Patent Title: Coating arrangement and method
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Application No.: US16509512Application Date: 2019-07-12
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Publication No.: US11021787B2Publication Date: 2021-06-01
- Inventor: Carsten Deus
- Applicant: VON ARDENNE Asset GmbH & Co. KG
- Applicant Address: DE Dresden
- Assignee: VON ARDENNE Asset GmbH & Co. KG
- Current Assignee: VON ARDENNE Asset GmbH & Co. KG
- Current Assignee Address: DE Dresden
- Agency: Viering, Jentschura & Partner MbB
- Priority: DE102018117130.7 20180716
- Main IPC: C23C14/30
- IPC: C23C14/30 ; H01J37/305 ; H01J37/20 ; C23C14/50 ; H01J37/06

Abstract:
In accordance with various embodiments, a coating arrangement may comprise: an electron beam gun for providing an electron beam; a beam trap for trapping the electron beam; a control device for driving the electron beam gun and/or the beam trap, wherein the control device is configured to switch over the driving between a plurality of configurations, of which: in a first configuration, the electron beam is directed onto the beam trap; and in a second configuration, the electron beam is directed past the beam trap.
Public/Granted literature
- US20200017953A1 Coating arrangement and method Public/Granted day:2020-01-16
Information query
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