Invention Grant
- Patent Title: Image sensor with shallow trench edge doping
-
Application No.: US16860263Application Date: 2020-04-28
-
Publication No.: US10998360B2Publication Date: 2021-05-04
- Inventor: Yueh-Chuan Lee , Chia-Chan Chen
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H01L21/02 ; H01L29/06

Abstract:
The present disclosure relates to a method of forming an integrated chip. The method may be performed by selectively etching a substrate to define a trench. One or more dielectric materials are formed within the trench. A part of the one or more dielectric materials are removed from within the trench to expose a sidewall of the substrate defining the trench. A doped epitaxial material is formed along the sidewall of the substrate.
Public/Granted literature
- US20200258925A1 IMAGE SENSOR WITH SHALLOW TRENCH EDGE DOPING Public/Granted day:2020-08-13
Information query
IPC分类: