Invention Grant
- Patent Title: Semiconductor memory device
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Application No.: US16992213Application Date: 2020-08-13
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Publication No.: US10998337B2Publication Date: 2021-05-04
- Inventor: Kota Nishikawa , Hiroshi Tsubouchi , Kenri Nakai
- Applicant: Toshiba Memory Corporation
- Applicant Address: JP Minato-ku
- Assignee: Toshiba Memory Corporation
- Current Assignee: Toshiba Memory Corporation
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JPJP2018-125194 20180629
- Main IPC: G11C16/10
- IPC: G11C16/10 ; H01L27/11582 ; H01L23/528 ; G11C16/08 ; H01L27/1157 ; G11C16/14 ; G11C16/04 ; G11C16/26 ; H01L27/11573 ; H01L29/10 ; G11C11/56 ; G11C16/24

Abstract:
According to one embodiment, a semiconductor memory device includes the following configuration. A second word line is provided above a first word line on a substrate. A third word line is provided above the second word line. A semiconductor layer includes a first part that passes through the first word line, a second part that passes through the second and the third word lines, and is provided above the first part, and a joint provided between the first and second parts. When a write operation is performed on a memory cell of the third word line, prior to applying a write voltage to the third word line, a first voltage is applied to a bit line, a second voltage is applied to the third word line, and a third voltage higher than the second voltage is applied to the second word line.
Public/Granted literature
- US20200373326A1 SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2020-11-26
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