Invention Grant
- Patent Title: Semiconductor memory device
-
Application No.: US15917160Application Date: 2018-03-09
-
Publication No.: US10998328B2Publication Date: 2021-05-04
- Inventor: Osamu Matsuura , Satoshi Tatara
- Applicant: Toshiba Memory Corporation
- Applicant Address: JP Minato-ku
- Assignee: Toshiba Memory Corporation
- Current Assignee: Toshiba Memory Corporation
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Main IPC: H01L27/115
- IPC: H01L27/115 ; H01L27/1157 ; H01L27/11582 ; H01L27/11565 ; H01L27/11575

Abstract:
A semiconductor memory device includes a stacked body, a semiconductor member, and a first insulating member. Electrode films and insulating films are alternately stacked along a first direction in the stacked body. An end part of the stacked body is shaped like a staircase in which a terrace is formed for each of the electrode films. A portion of the electrode film placed in the end part is thicker than a portion of the electrode film placed in a central part of the stacked body. The semiconductor member extends in the first direction and penetrates through the central part of the stacked body. The first insulating member extends in the first direction and is provided in the end part.
Public/Granted literature
- US20180261608A1 SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2018-09-13
Information query
IPC分类: