Invention Grant
- Patent Title: Fabricating gate-all-around transistors having high aspect ratio channels and reduced parasitic capacitance
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Application No.: US16455892Application Date: 2019-06-28
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Publication No.: US10998311B2Publication Date: 2021-05-04
- Inventor: Effendi Leobandung
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Robert Sullivan
- Main IPC: H01L21/70
- IPC: H01L21/70 ; H01L27/088 ; H01L29/78 ; H01L29/66 ; H01L21/8234 ; H01L29/10

Abstract:
Embodiments of the invention are directed to a method of fabricating a semiconductor device. A non-limiting example of the method includes forming a fin over a substrate. The fin includes an upper fin region and a lower fin region. The lower fin region is physically coupled to the upper fin region and the substrate. A portion of the fin is removed to form a fin tunnel configured to physically separate the upper fin region from the lower fin region. A gate structure is formed and configured to fill the fin tunnel and cover a top surface, a bottom surface, a first sidewall, and a second sidewall of the upper fin region.
Information query
IPC分类: