Invention Grant
- Patent Title: Offset pads over TSV
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Application No.: US16440633Application Date: 2019-06-13
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Publication No.: US10998292B2Publication Date: 2021-05-04
- Inventor: Bongsub Lee , Guilian Gao
- Applicant: Invensas Bonding Technologies, Inc.
- Applicant Address: US CA San Jose
- Assignee: Invensas Bonding Technologies, Inc.
- Current Assignee: Invensas Bonding Technologies, Inc.
- Current Assignee Address: US CA San Jose
- Main IPC: H01L21/44
- IPC: H01L21/44 ; H01L23/04 ; H01L25/065 ; H01L23/00 ; H01L23/48 ; H01L23/482 ; H01L21/768 ; H01L23/522

Abstract:
Representative techniques and devices including process steps may be employed to mitigate the potential for delamination of bonded microelectronic substrates due to metal expansion at a bonding interface. For example, a metal pad may be disposed at a bonding surface of at least one of the microelectronic substrates, where the contact pad is positioned offset relative to a TSV in the substrate and electrically coupled to the TSV.
Public/Granted literature
- US20190385982A1 OFFSET PADS OVER TSV Public/Granted day:2019-12-19
Information query
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